Electron vibrometer and determining displacement of a cantilever

Patent metadata

Field	Value
Publication number	US-10060946-B2
Application number	US-201715449419-A
Country	US
Kind code	B2
Filing date	Mar 3, 2017
Priority date	Mar 8, 2016
Publication date	Aug 28, 2018
Grant date	Aug 28, 2018

Abstract

An electron vibrometer includes: an electron source providing a beam of primary electrons; a cantilever including: a receiver portion including: a gradient in thickness, a gradient in mass, atomic number of constituent atoms, or a combination thereof, the cantilever being disposed relative to the electron source such that the receiver portion of the cantilever receives the beam of primary electrons, and produces a plurality of scattered electrons from the receiver portion in response to receipt of the beam of primary electrons; and a charged particle detector that receives the plurality of scattered electrons from the receiver portion, and produces a detector signal comprising an amplitude that varies in relation to the gradient subject to receipt of the primary electrons, and the detector signal providing determination of the displacement of the cantilever.

First claim

What is claimed is:

1. An electron vibrometer to determine a displacement of a cantilever, the electron vibrometer comprising:
an electron source providing a beam of primary electrons;
the cantilever comprising:
a receiver portion comprising:
a gradient in mass, a gradient in thickness, a gradient in atomic number of constituent atoms, or a combination comprising at least one of the foregoing gradients,

the cantilever being disposed relative to the electron source such that the receiver portion of the cantilever receives the beam of primary electrons, and produces a plurality of scattered electrons from the receiver portion in response to receipt of the beam of primary electrons; and

a charged particle detector that receives the plurality of scattered electrons from the receiver portion, and produces a detector signal comprising an amplitude that varies in relation to the gradient subject to receipt of the primary electrons, and the detector signal providing determination of the displacement of the cantilever.

2. The electron vibrometer of claim 1 , further comprising a sample disposed proximate to the cantilever and arranged to interact with the cantilever.

3. The electron vibrometer of claim 1 , wherein:
the cantilever further comprises:
a body member; and
a tip disposed on the body member.

4. The electron vibrometer of claim 3 , wherein the tip comprises the receiver portion.

5. The electron vibrometer of claim 3 , wherein the body member comprises the receiver portion.

6. The electron vibrometer of claim 1 , wherein the beam of primary electrons comprises a beam diameter that is from 1 nanometer (nm) to 500 nm.

7. The electron vibrometer of claim 1 , wherein the charged particle detector comprises a scintillator, a solid state diode, a specimen current, or a combination comprising at least one of the foregoing charged particle detectors.

8. The electron vibrometer of claim 1 , wherein the scattered electrons comprise transmitted electrons, secondary electrons, or a combination comprising at least one of the foregoing scattered electrons.

9. The electron vibrometer of claim 8 , wherein the scattered electrons comprise the transmitted electrons, and
the charged particle detector comprises a transmitted electron detector.

10. The electron vibrometer of claim 9 , wherein the transmitted electron detector is disposed opposing the electron source, and
the receiver portion is interposed between the electron source and the transmitted electron detector.

11. The electron vibrometer of claim 8 , wherein the scattered electrons comprise the secondary electrons, and
the charged particle detector comprises a secondary electron detector.

12. The electron vibrometer of claim 11 , wherein the secondary electron detector and the electron source are disposed on a same side of the receiver portion.

13. A process for determining a displacement of a cantilever, the process comprising:
providing a beam of primary electrons;
subjecting the cantilever at a receiver portion to the beam of primary electrons, the cantilever comprising:
the receiver portion comprising:
a gradient in mass, a gradient in thickness, a gradient in atomic number of constituent atoms, or a combination comprising at least one of the foregoing gradients,

receiving the beam of primary electrons at the receiver portion of the cantilever;
producing a plurality of scattered electrons from the receiver portion in response to receiving the beam of primary electrons;
receiving the scattered electrons at a charged particle detector; and
producing, by the charged particle detector, a detector signal comprising an amplitude that varies in relation to the gradient present in the receiver portion to determine the displacement of the cantilever.

14. The process of claim 13 , further comprising interacting a sample with the cantilever.

15. The process for determining a displacement of a cantilever of claim 13 , wherein:
the cantilever further comprises:
a body member; and
a tip disposed on the body member.

16. The process for determining a displacement of a cantilever of claim 15 , wherein the tip comprises the receiver portion.

17. The process for determining a displacement of a cantilever of claim 15 , wherein the body member comprises the receiver portion.

18. The process for determining a displacement of a cantilever of claim 13 , wherein the beam of primary electrons comprises a beam diameter that is from 1 nanometer (nm) to 500 nm.

19. The process for determining a displacement of a cantilever of claim 13 , wherein the scattered electrons comprise the transmitted electrons;
the charged particle detector comprises a transmitted electron detector;
the transmitted electron detector is disposed opposing the electron source, and
the receiver portion is interposed between the electron source and the transmitted electron detector.

20. The process for determining a displacement of a cantilever of claim 13 , wherein the scattered electrons comprise the secondary electrons;
the charged particle detector comprises a secondary electron detector, and
the secondary electron detector and the electron source are disposed on a same side of the receiver portion.

Assignees

• Us Commerce

Inventors

• Woehl Taylor J
• Wagner Ryan B
• Killgore Jason
• Keller Robert

Classifications

• G01Q20/00 Primary

  Monitoring the movement or position of the probe · CPC title

• G01B15/00

  Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons (characterised by the use of optical techniques G01B9/00, G01B11/00) · CPC title

• G01N23/22

  by measuring secondary emission from the material · CPC title