Oxide particles, piezoelectric element, and method for producing oxide particles

Patent metadata

Field	Value
Publication number	US-10050191-B2
Application number	US-201514835371-A
Country	US
Kind code	B2
Filing date	Aug 25, 2015
Priority date	Feb 26, 2013
Publication date	Aug 14, 2018
Grant date	Aug 14, 2018

Abstract

The present invention provides oxide particles having a compositional formula of Pb(ZrxTi1-x)O3, wherein x is 0.46≤x≤0.6; wherein a size of the particle is from 0.5 to 10 μm; a porosity of a surface of the particle is 20% or less; and a shape of the particle is any one of a cube, a rectangular parallelepiped, or a truncated octahedron.

First claim

What is claimed is:

1. A piezoelectric element comprising:
a piezoelectric layer containing oxide particles having piezoelectricity; and
electrodes that sandwich the piezoelectric layer therebetween; wherein
the piezoelectric layer is formed by dispersing the oxide particles in a binder;
50% by mass or greater of the oxide particles contained in the piezoelectric layer is oxide particles having a compositional formula of Pb(Zr x T 1-x )O 3 , wherein x is 0.46≤x≤0.6; wherein
a size of the particle is from 0.5 to 10 μm;
a porosity of a surface of the particle is 20% or less; and
a shape of the particle is any one of a cube, a rectangular parallelepiped, or a truncated octahedron.

2. The piezoelectric element according to claim 1 , wherein at least 50% of a volume of the piezoelectric layer is the oxide particles.

3. The piezoelectric element according to claim 1 , wherein the piezoelectric layer is a layer in which the oxide particles are arranged two-dimensionally, or the piezoelectric layer is formed by laminating a plurality of layers in which the oxide particles are arranged two-dimensionally.

4. The piezoelectric element according to claim 1 , wherein, in the compositional formula, x is 0.48≤x≤0.56.

5. The piezoelectric element according to claim 1 , wherein a compositional ratio of Pb/(Zr+Ti) is from 0.95 to 1.05.

6. The piezoelectric element according to claim 1 , wherein a surface roughness Ra is 100 nm or less.

7. A method for producing oxide particles, the method comprising the steps of:
preparing a mixed raw material having a pH of 3 to 5, wherein
the mixed raw material is obtained by mixing:
a first raw material obtained by adding
at least one lead compound selected from the group consisting of chloride, nitrate, acetate, and hydroxide of lead element and hydrates thereof, and
a complex forming compound that is capable of forming a complex with the lead compound, the complex forming compound having at least one of amino group or carboxyl group, to a liquid, and
adding a basic substance to the liquid;

a zirconium raw material obtained by adding at least one zirconium compound selected from the group consisting of alkoxide, oxide, halide, nitrate, sulfate, and hydrolyzate of zirconium element and hydrates thereof, to a liquid; and
a titanium raw material obtained by adding at least one titanium compound selected from the group consisting of alkoxide, oxide, halide, nitrate, sulfate, and hydrolyzate of titanium element and hydrates thereof, to a liquid;
in a manner that x satisfies 0.46≤x≤0.6 in a compositional formula of Pb(Zr x Ti 1-x )O 3 ;
aging the mixed raw material having the pH of 3 to 5 by leaving the mixed raw material for 3 minutes or longer; and
performing hydrothermal synthesis after adding a basic substance to the aged mixed raw material.

8. The method for producing oxide particles according to claim 7 , wherein the mixed raw material is prepared by
preparing a second raw material obtained by adding the at least one zirconium compound as the zirconium raw material and the at least one titanium compound as the titanium raw material to a liquid; and
mixing the first raw material and the second raw material.

9. The method for producing oxide particles according to claim 7 , wherein the pH of the mixed raw material is adjusted to 3 to 5 by adding an acidic substance to at least one of the zirconium raw material and the titanium raw material.

10. The method for producing oxide particles according to claim 7 , wherein the pH of the mixed raw material is adjusted to 3 to 5 by adding an acidic substance to the first raw material.

11. The method for producing oxide particles according to claim 7 , wherein the pH of the mixed raw material is adjusted to 3 to 5 by adjusting an amount of the basic substance that is added to the first raw material.

12. The method for producing oxide particles according to claim 7 , wherein the pH of the mixed raw material is adjusted to 3 to 5 by adding an acidic substance to the mixed raw material.

13. The method for producing oxide particles according to claim 7 , wherein a basic substance is added to the aged mixed raw material to adjust a pH of the mixed raw material to 14 to 15.5.

14. The method for producing oxide particles according to claim 7 , wherein the complex forming compound is at least one selected from the group consisting of EDTA, NTA, DCTA, DTPA, EGTA, PDTA, BDTA, and derivatives thereof.

15. The method for producing oxide particles according to claim 7 , wherein the mixed raw material is prepared in a manner that the compositional ratio of Pb/(Zr+Ti) in the mixed raw material is from 1 to 1.3.

16. The method for producing oxide particles according to claim 7 , wherein the hydrothermal synthesis is performed at 100 to 300° C.

17. The method for producing oxide particles according to claim 7 , wherein heat treatment at 1250° C. or lower is performed on the oxide particles obtained by the hydrothermal synthesis.

18. The method for producing oxide particles according to claim 17 , wherein the compositional ratios of Pb/(Zr+Ti) of the oxide particles before and after the heat treatment are from 0.95 to 1.05.

19. The method for producing oxide particles according to claim 7 , wherein the aging of the mixed raw material is performed while the mixed raw material is stirred.

Assignees

• Fujifilm Corp

Inventors

• Sasaki Tsutomu
• Suzuki Masayuki

Classifications

• C30B29/32

  Titanates; Germanates; Molybdates; Tungstates · CPC title

• C04B2235/5436

  micrometer sized, i.e. from 1 to 100 micron · CPC title

• C30B28/04

  from liquids · CPC title

• C04B2235/52

  Constituents or additives characterised by their shapes · CPC title

• C01P2004/61

  Micrometer sized, i.e. from 1-100 micrometer · CPC title