Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management
US-12406872-B2 · Sep 2, 2025 · US
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Tappan James E patents
Tappan James E is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tappan James E |
| Total patents | 13 |
| First publication | Aug 11, 2015 |
| Latest publication | Sep 2, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Plasma processing devices having multi-port valve assemblies
US-12100575-B2 · Sep 24, 2024 · US
Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management
US-2022415702-A1 · Dec 29, 2022 · US
Chamber with vertical support stem for symmetric conductance and RF delivery
US-10665435-B2 · May 26, 2020 · US
Chamber with vertical support stem for symmetric conductance and rf delivery
US-2019371579-A1 · Dec 5, 2019 · US
Chamber with vertical support stem for symmetric conductance and RF delivery
US-10395902-B2 · Aug 27, 2019 · US
Plasma processing devices having multi-port valve assemblies
US-2018323041-A1 · Nov 8, 2018 · US
Chamber with vertical support stem for symmetric conductance and rf delivery
US-2018323044-A1 · Nov 8, 2018 · US
Chamber with vertical support stem for symmetric conductance and RF delivery
US-10049862-B2 · Aug 14, 2018 · US
Plasma processing devices having multi-port valve assemblies
US-10037869-B2 · Jul 31, 2018 · US
Recent patents
Latest publications not already listed above.
Chamber with vertical support stem for symmetric conductance and rf delivery
US-2016307743-A1 · Oct 20, 2016 · US
Plasma processing devices having multi-port valve assemblies
US-2016033977-A1 · Feb 4, 2016 · US
Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly and methods thereof
US-9103416-B2 · Aug 11, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32816 | 10 |
| H10P72/0471 | 6 |
| H01J37/32651 | 6 |
| H01J37/32724 | 6 |
| H01J37/32183 | 6 |