Electrodeposition systems and methods that minimize anode and/or plating solution degradation

Patent metadata

Field	Value
Publication number	US-10041183-B2
Application number	US-201715482938-A
Country	US
Kind code	B2
Filing date	Apr 10, 2017
Priority date	May 22, 2014
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

Disclosed are electrodeposition systems and methods wherein at least three electrodes are placed in a container containing a plating solution. The electrodes are connected to a polarity-switching unit and include a first electrode, a second electrode and a third electrode. The polarity-switching unit establishes a constant polarity state between the first and second electrodes in the solution during an active plating mode, wherein the first electrode has a negative polarity and the second electrode has a positive polarity, thereby allowing a plated layer to form on a workpiece at the first electrode. The polarity-switching unit further establishes an oscillating polarity state between the second and third electrodes during a non-plating mode (i.e., when the first electrode is removed from the plating solution), wherein the second electrode and the third electrode have opposite polarities that switch at regular, relatively fast, intervals, thereby limiting degradation of the second electrode and/or the plating solution.

First claim

What is claimed is:

1. An electrodeposition method comprising:
providing a container containing a plating solution and placing, in said container, three electrodes comprising:
a first electrode removeably placed in said plating solution;
a second electrode in said plating solution; and,
a third electrode;

establishing a constant polarity state between said first electrode and said second electrode in said plating solution during an active plating mode such that said first electrode has a negative polarity and said second electrode has a positive polarity; and
establishing an oscillating polarity state between said second electrode and said third electrode during a non-plating mode such that said second electrode and said third electrode have opposite polarities and such that said opposite polarities switch at regular intervals.

2. The electrodeposition method of claim 1 , said third electrode being in said plating solution and being a corrosion-resistant electrode.

3. The electrodeposition method of claim 1 ,
said plating solution comprising at least a solvent and, dissolved in said solvent, a substance comprising one of an acid and a base,
said plating solution further comprising organic additives dissolved in said solvent,
said container further being divided into a first compartment and a second compartment by a membrane,
said first compartment containing said plating solution,
said second compartment containing an additional solution and said third electrode in said additional solution,
said additional solution comprising only said solvent and said substance dissolved in said solvent,
said second electrode comprising any one of a soluble electrode and an insoluble electrode, and
said third electrode comprising an additional insoluble electrode.

4. The electrodeposition method of claim 1 , said second electrode comprising any one of a soluble electrode and an insoluble electrode, said third electrode and a fourth electrode being in said plating solution in said container and comprising insoluble electrodes and said method further comprising:
electrically connecting said fourth electrode to said second electrode, during said non-plating mode; and,
electrically disconnecting said fourth electrode from said second electrode and further establishing another oscillating polarity state between said fourth electrode and said third electrode, during said active plating mode.

5. The electrodeposition method of claim 1 ,
said establishing of said constant polarity state and said establishing of said oscillating polarity state being performed by a polarity-switching unit electrically connected to said first electrode, said second electrode and said third electrode, and further electrically connected to a negative terminal and a positive terminal of a power source and comprising:
receiving, by said polarity-switching unit, an operating mode select signal from a controller and a polarity-switching signal;
when said operating mode select signal indicates said active plating mode, electrically connecting said negative terminal to said first electrode and electrically connecting said positive terminal to said second electrode such that said constant polarity state between said first electrode and said second electrode is established; and
when said operating mode select signal indicates said non-plating mode, alternatingly electrically connecting said negative terminal to said second electrode and said third electrode at said regular intervals and alternatingly electrically connecting said positive terminal to said third electrode and said second electrode at said regular intervals such that said second electrode and said third electrode have said opposite polarities and such that said oscillating polarity state between said second electrode and said third electrode is established,
said polarity-switching signal having a frequency that defines said regular intervals.

6. The electrodeposition method of claim 5 , said frequency being predetermined to limit transfer of electrons at a surface of said second electrode.

7. The electrodeposition method of claim 1 , said second electrode being any one of a tin (Sn) electrode and a platinum (Pt) catalyst-coated titanium (Ti) electrode.

8. An electrodeposition method comprising:
providing a container containing a plating solution and placing, in said container, three electrodes comprising:
a first electrode removeably placed in said plating solution;
a second electrode in said plating solution; and,
a third electrode,
wherein a polarity-switching unit is electrically connected to said first electrode, said second electrode and said third electrode, and
wherein said polarity-switching unit comprises:
a first multiplexer that is electrically connected to a negative terminal of a power source and that receives both an operating mode select signal from a controller and a polarity-switching signal from a signal generator, the polarity-switching signal having a frequency that defines regular intervals; and
a second multiplexer that is electrically connected to a positive terminal of the power source and that receives both said operating mode select signal from said controller and said polarity-switching signal from said signal generator;

establishing, by said polarity-switching unit, a constant polarity state between said first electrode and said second electrode in said plating solution when said operating mode select signal indicates an active plating mode, wherein, during said constant polarity state, said first multiplexer electrically connects said negative terminal to said first electrode such that said first electrode maintains a negative polarity and said second multiplexer electrically connects said positive terminal to said second electrode such that said second electrode maintains a positive polarity, and
establishing, by said polarity-switching unit, an oscillating polarity state between said second electrode and said third electrode when said operating mode select signal indicates a non-plating mode, wherein, during said oscillating polarity state, said first multiplexer alternatingly electrically connects said negative terminal to said second electrode and said third electrode at said regular intervals and said second multiplexer alternatingly electrically connecting said positive terminal to said third electrode and said second electrode at said regular intervals such that said second electrode and said third electrode maintain opposite polarities.

9. The electrodeposition method of claim 8 , said third electrode being in said plating solution and being a corrosion-resistant electrode.

10. The electrodeposition method of claim 8 , said second electrode being any one of a soluble electrode and an insoluble electrode.

11. The electrodeposition method of claim 8 ,
said plating solution comprising a solvent and, dissolved in said solvent, at least a substance comprising one of an acid and a base,
said plating solution further comprising organic additives dissolved in said solvent,
said container being divided into a first compartment and a second compartment by a membrane,
said first compartment containing said plating solution,
said second compartment containing an additional solution and said third electrode in said additional solution,
said additional solution being different from said plating solution and comprising only said solvent and said substance dissolved in said solvent, and
said third electrode comprising an insoluble electrode.

12. The electrodeposition method of claim 8 ,
said third electrode and a fourth electrode being in said plating solution,
said third electrode and said

Assignees

• Globalfoundries Inc

Inventors

• Arvin Charles L
• Cox Harry D
• Perfecto Eric D

Classifications

• C25D21/12

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D17/10

  Electrodes {, e.g. composition, counter electrode} · CPC title

• C25D5/18 Primary

  Electroplating using modulated, pulsed or reversing current · CPC title