Wafer polishing apparatus
US-11198207-B2 · Dec 14, 2021 · US
US10035242B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10035242-B2 |
| Application number | US-201515033027-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 19, 2015 |
| Priority date | Jun 11, 2015 |
| Publication date | Jul 31, 2018 |
| Grant date | Jul 31, 2018 |
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Provided is a shot-blasting apparatus which is capable of efficiently perform dust collection and ventilation of an inside of a projection chamber, even using a dust collector having a small-size and low-cost suction device. The shot-blasting apparatus comprises: a cabinet ( 10 ); a plurality of process chambers ( 13 a, 13 b ) provided inside the cabinet in such a manner that each of the process chambers is capable of housing a workpiece therein and selectively movable between a carry-in-and-out position and a projection position; an air inlet port ( 19 ) for introducing external air into each of the process chambers therethrough; and an air outlet port provided at a position opposed to the air inlet port across the process chamber set at the projection position, and linearly communicated with an internal space of the process chamber set at the projection position, wherein, according to suction from the air outlet port, air is caused to flow from the air inlet port into the process chamber set at the projection position, and led to the air outlet port while passing through the process chamber set at the projection position.
Opening claim text (preview).
What is claimed is: 1. A shot-blasting apparatus comprising: a cabinet; a rotary hanger placed in the cabinet for rotation around a central axis; a plurality of process chambers defined inside the rotary hanger at equal angular intervals in a circumferential direction around the central axis, each of the plurality of process chambers is configured to store a workpiece therein and movable, as the rotary hanger rotates around the central axis, between a first position at which the workpiece is loaded in the process chamber and a second position at which the workpiece is shot-blasted; an air introduction chamber defined inside the rotary hanger between two adjacent process chambers for rotation with the process chambers, a process chamber and an air introduction chamber adjacent thereto being separated by a partition wall, wherein each air introduction chamber is associated with one process chamber adjacent thereto for introduction of air from an air introduction chamber into its associated process chamber; a suction port formed in each air introduction chamber and configured to suck external air into the corresponding air introducing chamber therethrough; an air outlet port fixedly provided in the cabinet for communication with a process chamber placed at the second position; and an air inlet port formed in a partition wall separating a respective process chamber from its associated air introduction chamber and adapted for air communication therebetween to introduce air in an air introduction chamber into its associated process chamber, wherein the air inlet port is positioned in the partition wall to have a geographical relationship with the air outlet port that creates an airflow path running from the air inlet port to the air outlet port across the process chamber located at the second position. 2. The shot-blasting apparatus according to claim 1 , wherein the rotary hanger comprises a ceiling, the cabinet comprises a floor, the air outlet port is formed in the floor of the cabinet, the suction port is formed in the ceiling of the rotary hanger, and the inlet port is positioned in a direction of the central axis between the floor of the cabinet and the sealing of the rotary hanger. 3. The shot-blasting apparatus according to claim 2 , further comprising a hood attached to a respective inlet port, the hood being formed with an opening facing upward and configured to collect air coming down from the suction port and pass the collected air through the inlet port to the process chamber in a downward direction.
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