Method and system for a spiral mixer

Patent metadata

Field	Value
Publication number	US-10035113-B2
Application number	US-201514738128-A
Country	US
Kind code	B2
Filing date	Jun 12, 2015
Priority date	Feb 26, 2015
Publication date	Jul 31, 2018
Grant date	Jul 31, 2018

Abstract

Included is a method and system of generating a diffused fluid using a spiral mixer comprising: injecting a first fluid into a first inlet port, generating a first fluid ribbon using a first narrow-gap slot; injecting a second fluid into a second inlet port and generating a second fluid ribbon; combining the first fluid and the second fluid ribbon into a spiraling flow around a cone feature in the mixing chamber of the first spiral mixing block, generating a combined flow of diffused fluids; dividing the combined flow in the mixing chamber of the first flow divider block, generating a divided flow of diffused fluids; combining the divided flow a mixing chamber of the final spiral mixing block, generating a final combined fluid flow in a spiraling flow around a final cone feature; and flowing the final combined fluid flow and dispensing the combined fluid flow onto a substrate.

First claim

What is claimed is:

1. A system designed to combine and uniformly blend two or more fluids, the system comprising a spiral mixer, the spiral mixer comprising:
a first injector configured to inject a first fluid into a first inlet port of an input block of the spiral mixer, the first inlet port coupled to a first slot-shaped passage for generating a first fluid ribbon;
a second injector configured to inject a second fluid into a second inlet port of the input block, the second inlet port coupled to a second slot-shaped passage for generating a second fluid ribbon;
a mixing module coupled to the first injector and the second injector and configured to receive the first fluid ribbon and the second fluid ribbon from the first and second slot-shaped passages in opposing relation with the first fluid ribbon on top of the second fluid ribbon into a mixing chamber and perform a mixing process, the mixing module generating two mixed spiraling flows, the mixing module comprising:
a first spiral mixing block coupled to the input block via a first cylindrical mixing chamber having a cone feature therein and configured to perform a first stage mixing of the opposed first fluid ribbon and the second fluid ribbon around the cone feature in a smooth combined spiraling flow;
a flow divider block coupled to the first spiral mixing block via a flow divider mixing chamber and configured to divide the combined spiraling flow into two mixed spiraling flows;

a final spiral mixing block coupled to the flow divider block and configured to combine the two mixed spiraling flows into a combined mixed spiraling flow using a final mixing chamber and configured to refine a mixing uniformity of the combined mixed spiraling flow, generating a combined final spiraling flow; and
an outlet block coupled to the final spiral mixing block and configured to continue mixing of the combined final spiraling flow in an outlet mixing chamber to achieve target mixing objectives for an outlet spiraling flow exiting the outlet block;
a control system for monitoring and adjusting the mixing process, wherein two or more selected mixing variables of the mixing process are concurrently controlled and kept within acceptable ranges in order to achieve the target mixing objectives for the outlet spiraling flow.

2. The system of claim 1 wherein target mixing objectives include non-uniformity of the outlet spiraling flow being 1% or less.

3. The system of claim 2 wherein the target mixing objectives include the absence of turbulence in the first fluid ribbon and the second fluid ribbon through the input block and absence of turbulence of the spiraling flows in the mixing chamber in the mixing module, the final spiral mixing block, and the outlet block.

4. The system of claim 1 wherein the total volume of the mixing chamber of the spiral mixer is in a range from 0.2 to 0.8 cm 3 and wherein the outlet spiraling flow of the outlet block is delivered proximate to a dispense device.

5. The system of claim 1 further comprising a third injector configured to inject a third fluid into a third inlet port of the input block of the spiral mixer, the third inlet port coupled to a third slot-shaped passage for generating a third fluid ribbon.

6. The system of claim 1 wherein the first fluid is a resist and the second fluid is a developer or wherein viscosity and density of the first fluid and the second fluid are close to the viscosity and density of water.

7. The system of claim 1 wherein the first injector injects the first fluid with a force in a range of 5.0 to 9.0 e −4 kg/s, the second injector injects the second fluid with a force in a range of 1.0 to 5.0 e −4 kg/s, and a width of each of the first slot-shaped passage and the second slot-shaped passage is in a range from 0.10 to 0.20 mm.

8. The system of claim 7 wherein an outlet pressure for the outlet spiraling flow in the outlet block is in a range from 1 to 7 psi or wherein a volume flow rate of the outlet spiraling flow is in a range from 0.5 to 3.0 cc/s or wherein residence time for the first fluid and the second fluid in the mixing module is in a range from 0.1 to 0.5 s or wherein a back pressure in the flow of the outlet spiraling flow is in a range from 0.1 to 0.9 psi.

9. The system of claim 1 wherein the mixing module comprises two or more connected mixing modules.

10. The system in claim 9 wherein the number of connected mixing modules is based on an application and the selected mixing objectives, the application characterized primarily on the first fluid and the second fluid used in the mixing process.

11. The system in claim 9 wherein the number of connected mixing modules is influenced by a requirement to have a required distance of laminar mixing of the first and the second fluid in order to achieve a non-uniformity objective and the need to preserve the chemical structure of the first and the second fluid.

12. The system in claim 1 wherein a cone feature at a beginning of the first spiral mixing block and at a beginning of the final spiral mixing block is designed to reduce stagnation and recirculation of the combined spiraling flow.

13. The system in claim 1 wherein the first fluid is deionized water and the second fluid is a developer solution.

14. The system in claim 1 wherein the two or more mixing variables include force of injection of the first fluid, force of injection of the second fluid, density and/or viscosity of the first fluid and the second fluid, flow rate of the combined spiraling flow, back pressure at the mixing module, residence time of the first fluid and second fluid in the mixing module, outlet pressure of the outlet spiraling flow, Reynolds number of the combined spiraling flow, percentage non-uniformity of the combined spiraling flow, and distance travelled by the combined spiraling flow.

15. The system of claim 1 wherein blocks of the spiral mixer are fabricated from perfluoro-alkoxy (PFA), polychloro-triflouro-ethylene (PCTFE), or poly-tetra-flouro-ethylene (PTFE).

16. The system of claim 1 wherein poly-tetra-flouro-ethylene (PTFE) gaskets are used in between blocks or in between portions of blocks of the spiral mixer to prevent leakage of the first fluid, the second fluid or the combined spiraling flow.

17. The system of claim 1 wherein the spiral mixer comprises blocks that include machined holes or mixing chambers and mixing features wherein the blocks utilize a sealant in between the blocks or in between portions of the blocks and wherein a compressive force is applied to create a seal in between the blocks or portion of the blocks.

18. The system of claim 1 wherein a plurality of spiral mixers are supplied by a common delivery device for the first fluid and a common delivery device for the second fluid and the outlet spiraling flow of each mixer is delivered to a dispense device.

Assignees

• Tokyo Electron Ltd

Inventors

• Nasman Ronald
• Devilliers Anton J

Classifications

• B01F13/1027

  Operations & Transport · mapped topic

• B01F5/0065 Primary

  Operations & Transport · mapped topic

• B01F13/0059

  Operations & Transport · mapped topic

• B01F5/064

  Operations & Transport · mapped topic

• B01F2215/0096

  Operations & Transport · mapped topic