Magnetically microfocused electron emission source
US-11037753-B2 · Jun 15, 2021 · US
Charged particle source
US10032600B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10032600-B2 |
| Application number | US-201715404618-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 12, 2017 |
| Priority date | Dec 9, 2014 |
| Publication date | Jul 24, 2018 |
| Grant date | Jul 24, 2018 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
This invention provides a charged particle source, which comprises an emitter and means for generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.
First claim
Opening claim text (preview).
What is claimed is: 1. A condenser lens system, comprising: a first magnetic lens above an electron source; and a second magnetic lens below the electron source, wherein when a first magnetic field generated by the first magnetic lens is anti-symmetric to a second magnetic field generated by said second magnetic lens at a tip of the electron source, a compound magnetic field superposed by the first and second magnetic field is weakest at the tip and largest immediately long an optical axis of the electron source, and the compound magnetic field provides a high resolution mode, wherein when the first magnetic field generated by the first magnetic lens is symmetric to the second magnetic field generated by the second magnetic lens at the tip of the electron source, the compound magnetic field superposed by the first and second magnetic field is largest at the tip of the electron source, and the compound magnetic field provides a high throughput mode. 2. The condenser lens system according to claim 1 , wherein the weakest magnetic field at the tip of the electron source is zero. 3. The condenser lens system according to claim 2 , wherein the first magnetic lens includes a first excitation coil encompassed by a first yoke. 4. The condenser lens system according to claim 3 , wherein the second magnetic lens includes a second excitation coil encompassed by a second yoke. 5. The condenser lens system according to claim 4 , further comprising a vacuum tube encompassing the electron source and inside the first and second magnetic lenses.
Assignees
Inventors
Classifications
Arrangement of electrodes · CPC title
Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title
Pattern inspection · CPC title
Bores or yokes, i.e. magnetic circuit in general · CPC title
magnetic · CPC title
Patent family
Related publications grouped by family.
External sources
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US10032600B2 cover?
- This invention provides a charged particle source, which comprises an emitter and means for generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens …
- Who is the assignee on this patent?
- Hermes Microvision Inc, Hermes Microvision Inc
- What technology area does this patent fall under?
- Primary CPC classification H01J37/143. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jul 24 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).