Substrate support device
US-2015376783-A1 · Dec 31, 2015 · US
Heating device
US10014194B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10014194-B2 |
| Application number | US-201715793052-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 25, 2017 |
| Priority date | Oct 28, 2016 |
| Publication date | Jul 3, 2018 |
| Grant date | Jul 3, 2018 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A heating device includes a base body 2 that has a placement surface 2 a for placing a wafer W thereon; a heating resistor 4 that is embedded in the base body 2 ; a cylindrical supporting body 3 that has one end surface 3 a that is connected to a back surface 2 b of the base body 2 that is on an opposite side of the placement surface 2 a , the one end surface 3 a having an open end; at least two supporting-body channels 5, 6 that are formed within a peripheral wall of the cylindrical supporting body 3 ; and a base-body channel 7 that is provided at only a portion of the base body 2 at an immediately overhead region of the cylindrical supporting body 3 , and that extends through the base body 2 and connects the at least two supporting-body channels 5, 6 to each other.
First claim
Opening claim text (preview).
What is claimed is: 1. A heating device comprising: a cylindrical supporting body that has one end surface defining an open end, the cylindrical supporting body including a peripheral wall defining at least two supporting-body channels; a base body having a placement surface for placing a substrate thereon and a back surface opposite the placement surface with the one end surface of the cylindrical supporting body connected to the back surface of the base body, the base body defining a base-body channel at only a portion of the base body immediately overhead of the cylindrical supporting body, the base-body channel extending through the base body and connecting the at least two supporting-body channels to each other; and a heating resistor embedded in the base body. 2. The heating device according to claim 1 , wherein the base-body channel is ring shaped. 3. The heating device according to claim 1 , further comprising a wire inserted in the cylindrical supporting body, extending through the base-body channel, and connected to the heating resistor. 4. The heating device according to claim 1 , wherein the cylindrical supporting body has an inner peripheral surface that defines a space and the base-body channel includes a branch path that is connected to the space.
Assignees
Inventors
Classifications
characterised by the mechanical construction of the susceptor, stage or support · CPC title
Temperature monitoring · CPC title
mainly by conduction · CPC title
- H10P72/0434Primary
mainly by convection · CPC title
- H01L21/67109Primary
Electricity · mapped topic
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- What does patent US10014194B2 cover?
- A heating device includes a base body 2 that has a placement surface 2 a for placing a wafer W thereon; a heating resistor 4 that is embedded in the base body 2 ; a cylindrical supporting body 3 that has one end surface 3 a that is connected to a back surface 2 b of the base body 2 that is on an opposite side of the placement surface 2 a , the one end surface 3 a hav…
- Who is the assignee on this patent?
- Ngk Spark Plug Co
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0434. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jul 03 2018 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).