NITRIDE INHIBITORS FOR HIGH SELECTIVITY OF TiN-SiN CMP APPLICATIONS
US-2019085205-A1 · Mar 21, 2019 · US
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Yeh Ming-Chih patents
Yeh Ming-Chih is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yeh Ming-Chih |
| Total patents | 6 |
| First publication | Aug 6, 2015 |
| Latest publication | Mar 21, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
CMP composition for silicon nitride removal
US-9803109-B2 · Oct 31, 2017 · US
CMP method for suppression of titanium nitride and titanium/titanium nitride removal
US-9752057-B2 · Sep 5, 2017 · US
Cmp composition for silicon nitride removal
US-2016222254-A1 · Aug 4, 2016 · US
Germanium chemical mechanical polishing
US-2016053381-A1 · Feb 25, 2016 · US
Cmp method for suppression of titanium nitride and titanium/titanium nitride removal
US-2015221521-A1 · Aug 6, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Cabot Microelectronics Corp | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C09G1/02 | 6 |
| H10P95/062 | 5 |
| H10P52/403 | 5 |
| H01L21/3212 | 4 |
| C09K3/1463 | 4 |