Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same
US-2026024733-A1 · Jan 22, 2026 · US
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Yang Jungmo patents
Yang Jungmo is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yang Jungmo |
| Total patents | 10 |
| First publication | Nov 3, 2022 |
| Latest publication | Jan 22, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same
US-12494352-B2 · Dec 9, 2025 · US
Plasma sensor module
US-12444590-B2 · Oct 14, 2025 · US
Substrate processing apparatus
US-2025174443-A1 · May 29, 2025 · US
Plasma light detection system including a scintillating window
US-2025085445-A1 · Mar 13, 2025 · US
Plasma diagnostic device, and semiconductor processing equipment using the same
US-2025046587-A1 · Feb 6, 2025 · US
Plasma sensor module
US-2024071737-A1 · Feb 29, 2024 · US
Semiconductor process device
US-2024047247-A1 · Feb 8, 2024 · US
Plasma etching apparatus and semiconductor processing system
US-2023078095-A1 · Mar 16, 2023 · US
Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same
US-2022351947-A1 · Nov 3, 2022 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 10 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0421 | 4 |
| H10P72/0604 | 4 |
| H01J2237/334 | 3 |
| H10P50/242 | 3 |
| H01J37/32642 | 3 |