Systems and methods for reducing effluent build-up in a pumping exhaust system
US-12049698-B2 · Jul 30, 2024 · US
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Xavier Antonio patents
Xavier Antonio is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Xavier Antonio |
| Total patents | 11 |
| First publication | Mar 5, 2015 |
| Latest publication | Jul 30, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing systems including gas delivery system with reduced dead legs
US-11959172-B2 · Apr 16, 2024 · US
Substrate processing systems including gas delivery system with reduced dead legs
US-2023279548-A1 · Sep 7, 2023 · US
Substrate processing systems including gas delivery system with reduced dead legs
US-11661654-B2 · May 30, 2023 · US
Systems and methods for reducing effluent build-up in a pumping exhaust system
US-2022259725-A1 · Aug 18, 2022 · US
Systems and methods for reducing effluent build-up in a pumping exhaust system
US-11332824-B2 · May 17, 2022 · US
Substrate processing systems including gas delivery system with reduced dead legs
US-2019323125-A1 · Oct 24, 2019 · US
High-conductance, non-sealing throttle valve with projections and stop surfaces
US-10294560-B2 · May 21, 2019 · US
Systems and methods for reducing effluent build-up in a pumping exhaust system
US-2018073137-A1 · Mar 15, 2018 · US
Plasma activated conformal film deposition
US-9230800-B2 · Jan 5, 2016 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 10 |
| Novellus Systems Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 9 |
| H01J37/3244 | 8 |
| C23C16/4412 | 6 |
| H01L21/67017 | 5 |
| H10P14/6336 | 5 |