Method and system for optical characterization of patterned samples
US-2024337590-A1 · Oct 10, 2024 · US
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Wolfling Shay patents
Wolfling Shay is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wolfling Shay |
| Total patents | 13 |
| First publication | Nov 5, 2015 |
| Latest publication | Oct 10, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and system for optical characterization of patterned samples
US-11885737-B2 · Jan 30, 2024 · US
Method and system for optical characterization of patterned samples
US-2021116359-A1 · Apr 22, 2021 · US
Method and system for optical characterization of patterned samples
US-10876959-B2 · Dec 29, 2020 · US
Overlay design optimization
US-10311198-B2 · Jun 4, 2019 · US
Method and system for determining strain distribution in a sample
US-10209206-B2 · Feb 19, 2019 · US
Method and system for optical characterization of patterned samples
US-2018328837-A1 · Nov 15, 2018 · US
Optical method and system for critical dimensions and thickness characterization
US-10054423-B2 · Aug 21, 2018 · US
Overlay design optimization
US-2017061066-A1 · Mar 2, 2017 · US
Hybrid metrology technique
US-2017018069-A1 · Jan 19, 2017 · US
Recent patents
Latest publications not already listed above.
Method and system for determining strain distribution in a sample
US-2016139065-A1 · May 19, 2016 · US
Optical method and system for critical dimensions and thickness characterization
US-2015345934-A1 · Dec 3, 2015 · US
Method and system for optical characterization of patterned samples
US-2015316468-A1 · Nov 5, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Nova Measuring Instr Ltd | 11 |
| Nova Ltd | 2 |
| Globalfoundries Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01N21/956 | 8 |
| G01N21/21 | 6 |
| G01N2201/0683 | 6 |
| G01N2021/4792 | 6 |
| G01N2201/061 | 6 |