Servo-control system
US-12278134-B2 · Apr 15, 2025 · US
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Wirth Paul patents
Wirth Paul is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wirth Paul |
| Total patents | 20 |
| First publication | Mar 12, 2015 |
| Latest publication | Apr 15, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Servo-control system
US-2024047263-A1 · Feb 8, 2024 · US
Calibration of an aligner station of a processing system
US-2024021458-A1 · Jan 18, 2024 · US
Servo-control system
US-11830760-B2 · Nov 28, 2023 · US
Calibration of an aligner station of a processing system
US-11823937-B2 · Nov 21, 2023 · US
Methods of use of a servo control system
US-11798833-B2 · Oct 24, 2023 · US
Mass flow control based on micro-electromechanical devices
US-11772958-B2 · Oct 3, 2023 · US
Servo-control system
US-2023028135-A1 · Jan 26, 2023 · US
Mass flow control based on micro-electromechanical devices
US-2022083081-A1 · Mar 17, 2022 · US
Servo control of a lift apparatus and methods of use thereof
US-2021265194-A1 · Aug 26, 2021 · US
Recent patents
Latest publications not already listed above.
Calibration of an aligner station of a processing system
US-2021057256-A1 · Feb 25, 2021 · US
Walking beam chamber
US-10923374-B1 · Feb 16, 2021 · US
Walking beam chamber
US-2021028040-A1 · Jan 28, 2021 · US
Microelectronic substrate electro processing system
US-10837119-B2 · Nov 17, 2020 · US
Microelectronic substrate electro processing system
US-2018298513-A1 · Oct 18, 2018 · US
Microelectronic substrate electro processing system
US-10087544-B2 · Oct 2, 2018 · US
Microelectronic substrate electro processing system
US-2016298255-A1 · Oct 13, 2016 · US
Microelectronic substrate electro processing system
US-9399827-B2 · Jul 26, 2016 · US
Anneal module for semiconductor wafers
US-9245767-B2 · Jan 26, 2016 · US
Anneal module for semiconductor wafers
US-2015069043-A1 · Mar 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 20 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7602 | 10 |
| H01L21/68707 | 9 |
| H10P72/7612 | 8 |
| H01L21/68742 | 8 |
| H10P72/722 | 6 |