Servo-control system

Patent metadata

Field	Value
Publication number	US-11830760-B2
Application number	US-202217954227-A
Country	US
Kind code	B2
Filing date	Sep 27, 2022
Priority date	Feb 26, 2020
Publication date	Nov 28, 2023
Grant date	Nov 28, 2023

Abstract

Disclosed herein are embodiments of a servo-control system comprising at least one pneumatic actuator comprising a movable member, at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator, at least one position sensor configured to measure a position of the moveable member, and a controller. The controller is configured to determine a control signal based at least in part on pressure measurements of the plurality of pressure sensors and a position measurement of the at least one position sensor, and apply the control signal to at least one proportional pneumatic valve to move the movable member to a target position.

First claim

What is claimed is:

1. A lift apparatus for transferring a substrate between a support and a transfer plane, the lift apparatus comprising:
a lift pin assembly, comprising:
a lift pin configured to move the substrate between the support and the transfer plane;
at least one pneumatic actuator comprising movable member configured to provide a load to the lift pin;
at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent;
a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator; and
at least one position sensor configured to measure a position of the member; and

a servo-control system in communication with the lift pin assembly, the servo-control system comprising a controller configured to:
determine an output force based on a commanded force and an estimated force, wherein the commanded force is based at least in part on a position measurement of the at least one position sensor, and wherein the estimated force is based at least in part on pressure measurements of the plurality of pressure sensors and the position measurement;
generate a control signal based on the output force; and
apply the control signal to the at least one proportional pneumatic valve to move the movable member.

2. The lift apparatus of claim 1 , wherein the lift apparatus comprises a plurality of lift pin assemblies.

3. The lift apparatus of claim 2 , wherein the plurality of lift pin assemblies are configured to move the substrate between the support and the transfer plane.

4. The lift apparatus of claim 2 , wherein the servo-control system is in communication with the plurality of lift pin assemblies.

5. The lift apparatus of claim 4 , wherein the servo-control system is configured to maintain a closed loop, wherein at least one of chamber pressure or movable member position is controlled within the at least one pneumatic actuator.

6. The lift apparatus of claim 4 , wherein the at least one proportional pneumatic valve is configured to direct pressurized fluid to at least one of a plurality of chambers in response to a control signal from the servo-control system.

7. The lift apparatus of claim 1 , wherein the at least one pneumatic actuator comprises a plurality of chambers, each chamber connected to the respective supply line measured by a respective one of the plurality of pressure sensors.

8. The lift apparatus of claim 1 , comprising a plurality of proportional pneumatic valves configured to transport fluid between the at least one pneumatic actuator and the pressurized fluid supply or the vent.

9. The lift apparatus of claim 1 , wherein the servo control system comprises a controller attached to the at least one pneumatic actuator, the plurality of pressure sensors, the at least one position sensor and the at least one proportional pneumatic valve.

10. A servo-control system, comprising:
at least one pneumatic actuator comprising a movable member;
at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent;
a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator;
at least one position sensor configured to measure a position of the movable member; and
a controller to:
determine an output force based on a commanded force and an estimated force, wherein the commanded force is based at least in part on a position measurement of the at least one position sensor, and wherein the estimated force is based at least in part on pressure measurements of the plurality of pressure sensors and the position measurement;
generate a control signal based on the output force; and
apply the control signal to at least one proportional pneumatic valve to move the movable member to a target position.

11. The servo-control system of claim 10 , wherein the control signal causes the at least one proportional pneumatic valve to move the movable member with at least one of a target velocity or a target acceleration.

12. The servo-control system of claim 10 , further comprising:
a lift pin attached to the movable member, wherein movement of the movable member causes movement of the lift pin.

13. The servo-control system of claim 10 , further comprising:
an assembly attached to the movable member, wherein movement of the movable member causes movement of the assembly.

14. The servo-control system of claim 10 , wherein the servo-control system is configured to maintain a closed loop, wherein at least one of chamber pressure or movable member position is controlled within the at least one pneumatic actuator.

15. The servo-control system of claim 10 , wherein the at least one proportional pneumatic valve is configured to direct pressurized fluid to at least one of a plurality of chambers in response to the control signal.

16. The servo-control system of claim 10 , wherein the at least one pneumatic actuator comprises a plurality of chambers, each chamber connected to the respective supply line measured by a respective one of the plurality of pressure sensors.

17. The servo-control system of claim 10 , comprising a plurality of proportional pneumatic valves configured to transport fluid between the at least one pneumatic actuator and the pressurized fluid supply or the vent.

18. The servo-control system of claim 10 , wherein a contact force applied by the movable member is adjustable between about 2 N and about 10 N.

19. The servo-control system of claim 10 , wherein the controller is further to:
determine a target position of an object connected to the movable member; and
determine a current position of the object connected to the movable member;
wherein the control signal is further determined based at least in part on the current position of the object and the target position of the object.

20. The servo-control system of claim 10 , wherein acceleration of the movable member is adjustable between about 10 mm/s and about 150 mm/s.

Assignees

• Applied Materials Inc

Inventors

• Wirth Paul
• Taheri Behzad

Classifications

• H10P72/7612 Primary

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H01L21/68742 Primary

  Electricity · mapped topic

• F15B9/03

  with electrical control means {(F15B9/07, F15B9/09, F15B9/17 take precedence)} · CPC title