Optical method and apparatus for quickly realizing precise calibration of lithography system
US-12541154-B2 · Feb 3, 2026 · US
This page is not indexed by search engines while we improve data quality.
Wei Yayi patents
Wei Yayi is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wei Yayi |
| Total patents | 14 |
| First publication | Jan 4, 2024 |
| Latest publication | Feb 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for correcting proximity effect of electron beam
US-12535742-B2 · Jan 27, 2026 · US
Method and apparatus for training on imaging of plasma lithography
US-2025383607-A1 · Dec 18, 2025 · US
Analytic method and device for quantitatively calculating line edge roughness in plasma ultra-diffraction photoetching process
US-2025224684-A1 · Jul 10, 2025 · US
Method for manufacturing semiconductor device
US-12237213-B2 · Feb 25, 2025 · US
Method and device for optimizing mask parameters
US-12222641-B2 · Feb 11, 2025 · US
Method for manufacturing semiconductor device
US-12198930-B2 · Jan 14, 2025 · US
Optical method and apparatus for quickly realizing precise calibration of lithography system
US-2024345488-A1 · Oct 17, 2024 · US
Method and apparatus for correcting proximity effect of electron beam
US-2024184217-A1 · Jun 6, 2024 · US
Method and device for optimizing mask parameters
US-2024176228-A1 · May 30, 2024 · US
Recent patents
Latest publications not already listed above.
Method for correcting lithography pattern of surface plasma
US-2024077799-A1 · Mar 7, 2024 · US
Method for manufacturing semiconductor device
US-2024055254-A1 · Feb 15, 2024 · US
Method for manufacturing semiconductor device
US-2024038584-A1 · Feb 1, 2024 · US
Method and apparatus for optimizing lithography quality, electronic device, medium and program product
US-2024005064-A1 · Jan 4, 2024 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Inst Of Microelectronics Cas | 14 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/705 | 6 |
| H10W20/0693 | 4 |
| H10W20/069 | 4 |
| H10P50/73 | 4 |
| H10P76/2041 | 4 |