Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
US-10215713-B2 · Feb 26, 2019 · US
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Wei Junwei patents
Wei Junwei is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wei Junwei |
| Total patents | 6 |
| First publication | Dec 31, 2015 |
| Latest publication | Feb 26, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
Defect marking for semiconductor wafer inspection
US-10082470-B2 · Sep 25, 2018 · US
Defect Marking For Semiconductor Wafer Inspection
US-2018088056-A1 · Mar 29, 2018 · US
Determining a Configuration for an Optical Element Positioned in a Collection Aperture During Wafer Inspection
US-2017292918-A1 · Oct 12, 2017 · US
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
US-9709510-B2 · Jul 18, 2017 · US
Determining a Configuration for an Optical Element Positioned in a Collection Aperture During Wafer Inspection
US-2015377797-A1 · Dec 31, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01N21/8851 | 6 |
| G01N21/9501 | 6 |
| G01N21/8806 | 6 |
| G01N21/956 | 6 |
| G01N21/95623 | 4 |