Devices and methods for controlling wafer uniformity in plasma-based process
US-2025343031-A1 · Nov 6, 2025 · US
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Wang Ming Chih patents
Wang Ming Chih is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wang Ming Chih |
| Total patents | 4 |
| First publication | Nov 10, 2022 |
| Latest publication | Nov 6, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Devices and methods for controlling wafer uniformity in plasma-based process
US-12463016-B2 · Nov 4, 2025 · US
Devices and methods for controlling wafer uniformity in plasma-based process
US-11769652-B2 · Sep 26, 2023 · US
Devices and methods for controlling wafer uniformity in plasma-based process
US-2022359165-A1 · Nov 10, 2022 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0421 | 4 |
| H01J37/32449 | 4 |
| G06F30/00 | 4 |
| H01J37/3211 | 4 |
| H01J2237/3341 | 4 |