Substrate halo arrangement for improved process uniformity
US-2019272983-A1 · Sep 5, 2019 · US
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Wallace Jay patents
Wallace Jay is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wallace Jay |
| Total patents | 4 |
| First publication | Mar 2, 2017 |
| Latest publication | Sep 5, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
Gas injection system for ion beam device
US-10062548-B2 · Aug 28, 2018 · US
Gas injection system for ion beam device
US-9865433-B1 · Jan 9, 2018 · US
Gas injection system for ion beam device
US-2017062185-A1 · Mar 2, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Varian Semiconductor Equipment Ass Inc | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/02 | 3 |
| H01J2237/006 | 3 |
| H01J37/3244 | 3 |
| H01J37/3056 | 3 |
| H10P72/0421 | 3 |