Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask
US-11079674-B2 · Aug 3, 2021 · US
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Waiblinger Markus patents
Waiblinger Markus is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Waiblinger Markus |
| Total patents | 3 |
| First publication | Jun 5, 2018 |
| Latest publication | Aug 3, 2021 |
Notable patents
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Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/706837 | 2 |
| G03F1/36 | 2 |
| G03F1/84 | 2 |
| G03F1/74 | 2 |
| G03F7/7065 | 2 |