Aqueous cleaning solution and method of protecting features on a substrate during etch residue removal
US-10844332-B2 · Nov 24, 2020 · US
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Toshima Takayuki patents
Toshima Takayuki is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Toshima Takayuki |
| Total patents | 4 |
| First publication | Oct 18, 2018 |
| Latest publication | Nov 24, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate liquid processing method, substrate liquid processing apparatus, and storage medium
US-10333062-B2 · Jun 25, 2019 · US
Aqueous cleaning solution and method of protecting features on a substrate during etch residue removal
US-2019185793-A1 · Jun 20, 2019 · US
Substrate liquid processing method, substrate liquid processing apparatus, and storage medium
US-2018301623-A1 · Oct 18, 2018 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P52/00 | 2 |
| H01L43/08 | 2 |
| H01L43/12 | 2 |
| H01L27/222 | 2 |
| H10N50/10 | 2 |