Plasma processing apparatus including gas distribution plate
US-2025149301-A1 · May 8, 2025 · US
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Sun Jong Woo patents
Sun Jong Woo is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sun Jong Woo |
| Total patents | 18 |
| First publication | Dec 21, 2017 |
| Latest publication | May 8, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus and method of processing a substrate
US-11837496-B2 · Dec 5, 2023 · US
Plasma processing apparatus including gas distribution plate
US-2023033091-A1 · Feb 2, 2023 · US
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
US-11437264-B2 · Sep 6, 2022 · US
Device for providing gas to a plasma chamber and a plasma processing device including the same
US-11289309-B2 · Mar 29, 2022 · US
Substrate processing apparatus and method of processing a substrate
US-2021272838-A1 · Sep 2, 2021 · US
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
US-2021175110-A1 · Jun 10, 2021 · US
Substrate processing apparatus including edge ring
US-11018046-B2 · May 25, 2021 · US
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
US-10964578-B2 · Mar 30, 2021 · US
Plasma processing apparatus
US-10903053-B2 · Jan 26, 2021 · US
Recent patents
Latest publications not already listed above.
Substrate processing apparatus including edge ring
US-2020328105-A1 · Oct 15, 2020 · US
Plasma monitoring apparatus, and plasma processing apparatus including the same
US-10748749-B1 · Aug 18, 2020 · US
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
US-2020135527-A1 · Apr 30, 2020 · US
Device for providing gas to a plasma chamber and a plasma processing device including the same
US-2020135433-A1 · Apr 30, 2020 · US
Plasma processing apparatus
US-2019378693-A1 · Dec 12, 2019 · US
Plasma processing apparatus including gas distribution plate
US-2019304751-A1 · Oct 3, 2019 · US
Plasma processing apparatus
US-10395900-B2 · Aug 27, 2019 · US
Plasma Processing Apparatus
US-2017365444-A1 · Dec 21, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 18 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0421 | 15 |
| H01L21/67069 | 15 |
| H01J37/3244 | 13 |
| H01J2237/334 | 11 |
| H01J37/32449 | 10 |