Mask for photolithography, method of manufacturing the same and method of manufacturing substrate using the same
US-10338463-B2 · Jul 2, 2019 · US
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Son Yong patents
Son Yong is listed as an inventor on 23 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Son Yong |
| Total patents | 23 |
| First publication | Mar 5, 2015 |
| Latest publication | Jul 2, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
Phase shift mask and method of forming patterns using the same
US-9977324-B2 · May 22, 2018 · US
Phase shift mask, method for manufacturing the same, and method for forming micro pattern
US-9885950-B2 · Feb 6, 2018 · US
Mask for photolithography, method of manufacturing the same and method of manufacturing substrate using the same
US-2017371238-A1 · Dec 28, 2017 · US
Mask for photolithography, method of manufacturing the same and method of manufacturing substrate using the same
US-9778558-B2 · Oct 3, 2017 · US
Mask, method of manufacturing the same, and method of manufacturing a display panel using the same
US-9733569-B2 · Aug 15, 2017 · US
Phase shift mask and method of forming patterns using the same
US-2017192348-A1 · Jul 6, 2017 · US
Phase shift mask and method of forming patterns using the same
US-9632438-B2 · Apr 25, 2017 · US
Patterning method using surface plasmon
US-9436091-B2 · Sep 6, 2016 · US
Display device
US-9417377-B2 · Aug 16, 2016 · US
Recent patents
Latest publications not already listed above.
Phase shift mask and method of manufacturing display apparatus using the same
US-9417516-B2 · Aug 16, 2016 · US
Mask and manufacturing method for liquid crystal display using the same
US-2016216602-A1 · Jul 28, 2016 · US
Phase shift mask, patterning method using the same and method of manufacturing display panel using the same
US-9395619-B2 · Jul 19, 2016 · US
Phase shift mask, method for manufacturing the same, and method for forming micro pattern
US-2016170294-A1 · Jun 16, 2016 · US
Phase shift mask and method of manufacturing display apparatus using the same
US-2016097972-A1 · Apr 7, 2016 · US
Mask for photolithography, method of manufacturing the same and method of manufacturing substrate using the same
US-2016033857-A1 · Feb 4, 2016 · US
System and method for image display
US-2015309763-A1 · Oct 29, 2015 · US
Phase shift mask and method of forming patterns using the same
US-2015293438-A1 · Oct 15, 2015 · US
Display device
US-2015277026-A1 · Oct 1, 2015 · US
Display apparatus
US-2015268693-A1 · Sep 24, 2015 · US
Patterning method using surface plasmon
US-2015234286-A1 · Aug 20, 2015 · US
Phase shift mask, patterning method using the same and method of manufacturing display panel using the same
US-2015198872-A1 · Jul 16, 2015 · US
Mask for exposure, method of fabricating the same, and method of fabricating display panel using the mask
US-2015064857-A1 · Mar 5, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Display Co Ltd | 24 |
| Univ Yonsei Iacf | 2 |
| Industry-Academic Cooperation Foundation Yonsei Univ | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/26 | 14 |
| G03F7/20 | 7 |
| H10P76/204 | 7 |
| G03F1/32 | 7 |
| G03F1/30 | 6 |