Silicon precursor having a heterocyclic group, composition for depositing a silicon-containing layer comprising the same and method of depositing a silicon-containing layer using the same
US-12593628-B2 · Mar 31, 2026 · US
This page is not indexed by search engines while we improve data quality.
Son Seung patents
Son Seung is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Son Seung |
| Total patents | 9 |
| First publication | Jul 14, 2016 |
| Latest publication | Mar 31, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of manufacturing sacrificial layer and method of manufacturing semiconductor device by using the same
US-2026090364-A1 · Mar 26, 2026 · US
Composition for depositing a silicon-containing layer and method of depositing a silicon-containing layer using the same
US-12546001-B2 · Feb 10, 2026 · US
Process of forming silicon-containing film and method of manufacturing integrated circuit device using the same
US-2023407051-A1 · Dec 21, 2023 · US
Silicon compound and method of manufacturing integrated circuit device using the same
US-2023406822-A1 · Dec 21, 2023 · US
Silicon precursor having a heterocyclic group, composition for depositing a silicon-containing layer comprising the same and method of depositing a silicon-containing layer using the same
US-2023307227-A1 · Sep 28, 2023 · US
Composition for depositing a silicon-containing layer and method of depositing a silicon-containing layer using the same
US-2023304155-A1 · Sep 28, 2023 · US
Polymer and composition containing same
US-10214610-B2 · Feb 26, 2019 · US
Novel polymer and composition containing same
US-2016200853-A1 · Jul 14, 2016 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Dnf Co Ltd | 8 |
| Samsung Electronics Co Ltd | 7 |
| Skc Co Ltd | 2 |
| Park Joo Hyeon | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45553 | 6 |
| C23C16/401 | 5 |
| H10P14/6339 | 4 |
| H10P14/69215 | 4 |
| C23C16/4408 | 4 |