Model for accurate photoresist profile prediction
US-9733576-B2 · Aug 15, 2017 · US
Smith Mark Davis is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Smith Mark Davis |
| Total patents | 2 |
| First publication | Sep 17, 2015 |
| Latest publication | Aug 15, 2017 |
Publications ranked by popularity score, then publication date.
US-9733576-B2 · Aug 15, 2017 · US
US-2015261896-A1 · Sep 17, 2015 · US
Latest publications not already listed above.
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Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 2 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/0392 | 2 |
| G03F7/70625 | 2 |
| G03F7/705 | 2 |
| G03F7/70525 | 2 |
| H10P74/203 | 2 |