Photoresist-free photolithography, photoprocessing tools, and methods with VUV or deep-UV lamps
US-12523933-B2 · Jan 13, 2026 · US
Sievers Dane is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sievers Dane |
| Total patents | 5 |
| First publication | Oct 28, 2021 |
| Latest publication | Jan 13, 2026 |
Publications ranked by popularity score, then publication date.
US-12523933-B2 · Jan 13, 2026 · US
US-2025046606-A1 · Feb 6, 2025 · US
US-12011736-B2 · Jun 18, 2024 · US
US-2022193718-A1 · Jun 23, 2022 · US
US-2021333711-A1 · Oct 28, 2021 · US
Latest publications not already listed above.
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Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Univ Illinois | 5 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0436 | 2 |
| G03F7/2004 | 2 |
| G03F7/2008 | 2 |
| G03F7/2014 | 2 |
| G03F7/039 | 2 |