Polishing pad, polishing apparatus and a method for polishing silicon wafer
US-11471997-B2 · Oct 18, 2022 · US
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Sha Youhe patents
Sha Youhe is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sha Youhe |
| Total patents | 3 |
| First publication | Jan 13, 2022 |
| Latest publication | Oct 18, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and device of chemical mechanical polishing
US-2022097199-A1 · Mar 31, 2022 · US
Polishing pad, polishing apparatus and a method for polishing silicon wafer
US-2022009051-A1 · Jan 13, 2022 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zing Semiconductor Corp | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P52/402 | 3 |
| H10P90/129 | 3 |
| B24B37/04 | 3 |
| B24B29/02 | 3 |
| H10P72/0428 | 3 |