Method and apparatus for performing an aerial image simulation of a photolithographic mask
US-11366382-B2 · Jun 21, 2022 · US
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Schauer Anja patents
Schauer Anja is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Schauer Anja |
| Total patents | 2 |
| First publication | Aug 26, 2021 |
| Latest publication | Jun 21, 2022 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 2 |
| Zeiss Carl Sms Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70666 | 2 |
| G03F1/84 | 2 |
| G03F1/70 | 2 |
| G03F1/72 | 2 |
| G03F1/68 | 2 |