Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating
US-12227840-B2 · Feb 18, 2025 · US
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Ramdutt Devin patents
Ramdutt Devin is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ramdutt Devin |
| Total patents | 5 |
| First publication | Apr 24, 2018 |
| Latest publication | Feb 18, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating
US-2022380894-A1 · Dec 1, 2022 · US
Surface coating for plasma processing chamber components
US-2018240649-A1 · Aug 23, 2018 · US
Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating
US-2018148835-A1 · May 31, 2018 · US
Symmetric RF return path liner
US-9953825-B2 · Apr 24, 2018 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7614 | 3 |
| H10P72/0602 | 3 |
| H10P72/0434 | 3 |
| H10P72/722 | 3 |
| C23C16/463 | 3 |