Optical assembly, method for controlling an optical assembly, and projection exposure apparatus
US-12443110-B2 · Oct 14, 2025 · US
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Raba Andreas patents
Raba Andreas is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Raba Andreas |
| Total patents | 12 |
| First publication | Dec 1, 2022 |
| Latest publication | Oct 14, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Adaptive mirror with mechanical mediator layer and microlithographic projection exposure apparatus
US-2025264712-A1 · Aug 21, 2025 · US
Optical system, and method for operating an optical system
US-2025258444-A1 · Aug 14, 2025 · US
Projection exposure apparatus for semiconductor lithography
US-12372877-B2 · Jul 29, 2025 · US
Mirror device, for example for a microlithographic projection exposure system, and method for measuring the temperature of a mirror
US-2025216794-A1 · Jul 3, 2025 · US
Mirror device, projection objective and method for measuring the temperature of a mirror
US-2025216801-A1 · Jul 3, 2025 · US
Optical assembly, projection exposure apparatus and method
US-12313978-B2 · May 27, 2025 · US
Optical element and projection exposure apparatus for semiconductor lithography
US-2025130504-A1 · Apr 24, 2025 · US
Temperature-insensitive actuator and deformation mirror
US-2025044711-A1 · Feb 6, 2025 · US
Projection exposure apparatus for semiconductor lithography
US-2024012334-A1 · Jan 11, 2024 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70266 | 11 |
| G02B26/0825 | 7 |
| G03F7/70891 | 6 |
| G02B5/0891 | 6 |
| G02B7/185 | 5 |