Substrate carrier using a proportional thermal fluid delivery system
US-11615973-B2 · Mar 28, 2023 · US
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Phi Justin patents
Phi Justin is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Phi Justin |
| Total patents | 12 |
| First publication | Apr 6, 2017 |
| Latest publication | Mar 28, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Radio frequency (RF) pulsing impedance tuning with multiplier mode
US-10854427-B2 · Dec 1, 2020 · US
Radio frequency (rf) pulsing impedance tuning with multiplier mode
US-2020075290-A1 · Mar 5, 2020 · US
Substrate carrier using a proportional thermal fluid delivery system
US-2020051839-A1 · Feb 13, 2020 · US
Substrate carrier using a proportional thermal fluid delivery system
US-10490429-B2 · Nov 26, 2019 · US
RF power delivery regulation for processing substrates
US-10468233-B2 · Nov 5, 2019 · US
Smart multi-level RF pulsing methods
US-9872373-B1 · Jan 16, 2018 · US
Rf power delivery regulation for processing substrates
US-2017358428-A1 · Dec 14, 2017 · US
RF power delivery with approximated saw tooth wave pulsing
US-9788405-B2 · Oct 10, 2017 · US
RF power delivery regulation for processing substrates
US-9741539-B2 · Aug 22, 2017 · US
Recent patents
Latest publications not already listed above.
Rf power delivery regulation for processing substrates
US-2017098527-A1 · Apr 6, 2017 · US
Rf power delivery with approximated saw tooth wave pulsing
US-2017099722-A1 · Apr 6, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32146 | 9 |
| H01J37/32183 | 8 |
| H10P50/242 | 7 |
| H01J2237/334 | 6 |
| H01J37/32091 | 5 |