Dynamic impedance control for a substrate support of a plasma processing system
US-2026031303-A1 · Jan 29, 2026 · US
Peng Fei is listed as an inventor on 23 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Peng Fei |
| Total patents | 23 |
| First publication | Mar 16, 2017 |
| Latest publication | Jan 29, 2026 |
Publications ranked by popularity score, then publication date.
US-2026031303-A1 · Jan 29, 2026 · US
US-2025348658-A1 · Nov 13, 2025 · US
US-12302036-B1 · May 13, 2025 · US
US-2024408790-A1 · Dec 12, 2024 · US
US-12053906-B2 · Aug 6, 2024 · US
US-11900675-B2 · Feb 13, 2024 · US
US-2023339226-A1 · Oct 26, 2023 · US
US-2023339819-A1 · Oct 26, 2023 · US
US-11566322-B2 · Jan 31, 2023 · US
US-2023020233-A1 · Jan 19, 2023 · US
Latest publications not already listed above.
US-2022342126-A1 · Oct 27, 2022 · US
US-11462009-B2 · Oct 4, 2022 · US
US-2022009124-A1 · Jan 13, 2022 · US
US-2021292894-A1 · Sep 23, 2021 · US
US-2021222291-A1 · Jul 22, 2021 · US
US-10685113-B2 · Jun 16, 2020 · US
US-2019370546-A1 · Dec 5, 2019 · US
US-2019005242-A1 · Jan 3, 2019 · US
US-10043641-B2 · Aug 7, 2018 · US
US-2018082827-A1 · Mar 22, 2018 · US
US-2018057935-A1 · Mar 1, 2018 · US
US-9749066-B2 · Aug 29, 2017 · US
US-2017078030-A1 · Mar 16, 2017 · US
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Apple Inc | 7 |
| Applied Materials Inc | 7 |
| Univ Clemson Res Foundation | 5 |
| Bwxt Nog Tech Inc | 2 |
| Litepoint Corp | 2 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4405 | 6 |
| G06V20/20 | 4 |
| G06T7/11 | 4 |
| G06V40/171 | 4 |
| G06V40/172 | 4 |