Ion source having different modes of operation
US-12154766-B2 · Nov 26, 2024 · US
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Patel Shardul S patents
Patel Shardul S is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Patel Shardul S |
| Total patents | 13 |
| First publication | Apr 2, 2015 |
| Latest publication | Nov 26, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Hybrid ion source for aluminum ion generation using a target holder and a solid target
US-12094681-B2 · Sep 17, 2024 · US
Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid target
US-12040154-B2 · Jul 16, 2024 · US
Ion source having different modes of operation
US-2023395357-A1 · Dec 7, 2023 · US
Hybrid ion source for aluminum ion generation using a target holder and a solid target
US-2023369008-A1 · Nov 16, 2023 · US
Hybrid ion source for aluminum ion generation using a target holder and organoaluminium compounds
US-2023369006-A1 · Nov 16, 2023 · US
Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid target
US-2023369007-A1 · Nov 16, 2023 · US
Cryogenic ferrofluid sealed rotary union
US-10704693-B2 · Jul 7, 2020 · US
Cryogenic Ferrofluid Sealed Rotary Union
US-2019301616-A1 · Oct 3, 2019 · US
SiC coating in an ion implanter
US-9793086-B2 · Oct 17, 2017 · US
Recent patents
Latest publications not already listed above.
SiC Coating In an Ion Implanter
US-2016293378-A1 · Oct 6, 2016 · US
SiC coating in an ion implanter
US-9384937-B2 · Jul 5, 2016 · US
SiC Coating In An Ion Implanter
US-2015090897-A1 · Apr 2, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 7 |
| Varian Semiconductor Equipment Ass Inc | 4 |
| Varian Semiconductor Equipment | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/08 | 9 |
| H01J37/3244 | 7 |
| H01J27/205 | 5 |
| H01J2237/061 | 4 |
| H01J37/3171 | 4 |