Furnace tube for thin film deposition, thin film deposition method and processing apparatus
US-2025109495-A1 · Apr 3, 2025 · US
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Park Daniel patents
Park Daniel is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Park Daniel |
| Total patents | 1 |
| First publication | Apr 3, 2025 |
| Latest publication | Apr 3, 2025 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Acm Research Shanghai Inc | 1 |
| Acm Res Lingang Inc | 1 |
| Acm Res Korea Co Ltd | 1 |
| Cleanchip Tech Limited | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45502 | 1 |
| C23C16/4583 | 1 |
| C23C16/45561 | 1 |
| C23C16/45544 | 1 |
| Y02P70/50 | 1 |