Substrate processing apparatus and electrostatic chuck
US-2025308865-A1 · Oct 2, 2025 · US
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Otsuki Kohei patents
Otsuki Kohei is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Otsuki Kohei |
| Total patents | 14 |
| First publication | May 19, 2016 |
| Latest publication | Oct 2, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus and electrostatic chuck
US-2025087469-A1 · Mar 13, 2025 · US
Substrate processing apparatus and electrostatic chuck
US-12217943-B2 · Feb 4, 2025 · US
Plasma processing apparatus and plasma processing method
US-11862436-B2 · Jan 2, 2024 · US
Flexible pipe and temperature control system
US-11566728-B2 · Jan 31, 2023 · US
Substrate processing apparatus and electrostatic chuck
US-2022406576-A1 · Dec 22, 2022 · US
Plasma processing apparatus and plasma processing method
US-2022044914-A1 · Feb 10, 2022 · US
Plasma processing apparatus and plasma processing method
US-11183371-B2 · Nov 23, 2021 · US
Heat insulating pipe system and processing system
US-10787950-B2 · Sep 29, 2020 · US
Plasma processing apparatus and plasma processing method
US-2020211826-A1 · Jul 2, 2020 · US
Recent patents
Latest publications not already listed above.
Heat insulating pipe system and processing system
US-2019242289-A1 · Aug 8, 2019 · US
Flexible pipe and temperature control system
US-2019234534-A1 · Aug 1, 2019 · US
Navigation system and bypass route setting method
US-10260899-B2 · Apr 16, 2019 · US
Navigation system and bypass route setting method
US-2016138929-A1 · May 19, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 12 |
| Alpine Electronics Inc | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 8 |
| H10P72/0421 | 8 |
| H10P72/0434 | 8 |
| H01J37/32724 | 8 |
| H01J37/32449 | 8 |