Apparatus and method for processing substrate
US-12327735-B2 · Jun 10, 2025 · US
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Oh Sehoon patents
Oh Sehoon is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Oh Sehoon |
| Total patents | 13 |
| First publication | Feb 2, 2017 |
| Latest publication | Jun 10, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Work space force/acceleration disturbance observer and robot including the same
US-2025170713-A1 · May 29, 2025 · US
Task space outer-loop integrated disturbance observer and robot including the same
US-2025162144-A1 · May 22, 2025 · US
Photomask processing apparatus and method of processing photomask
US-2024053685-A1 · Feb 15, 2024 · US
Control device for plant and controlling method of the same
US-11835929-B2 · Dec 5, 2023 · US
Control device for plant and controlling method of the same
US-2022276621-A1 · Sep 1, 2022 · US
Apparatus and method for processing substrate
US-2021013049-A1 · Jan 14, 2021 · US
Elastically actuating device
US-10533904-B2 · Jan 14, 2020 · US
Cleaning liquid supply unit, substrate treating apparatus including the same, and substrate treating method
US-2019057884-A1 · Feb 21, 2019 · US
Elastically actuating device
US-2019041276-A1 · Feb 7, 2019 · US
Recent patents
Latest publications not already listed above.
Apparatus and method for manufacturing cleaning solution
US-2018335661-A1 · Nov 22, 2018 · US
Nozzle and substrate treating apparatus including the same
US-10005092-B2 · Jun 26, 2018 · US
Nozzle and substrate treating apparatus including the same
US-2017028413-A1 · Feb 2, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semes Co Ltd | 7 |
| Daegu Gyeongbuk Inst Science & Tech | 6 |
| Nau Robotics Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0414 | 4 |
| H10P72/0602 | 3 |
| B25J13/085 | 2 |
| B25J9/1653 | 2 |
| B25J9/1633 | 2 |