Spin chuck with concentrated center and radial heating
US-10658204-B2 · May 19, 2020 · US
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Mueller Gerhard patents
Mueller Gerhard is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mueller Gerhard |
| Total patents | 2 |
| First publication | Feb 14, 2019 |
| Latest publication | May 19, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Spin chuck with concentrated center and radial heating
US-2019051541-A1 · Feb 14, 2019 · US
Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Ag | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7614 | 2 |
| H10P72/0408 | 2 |
| H10P72/7608 | 2 |
| H10P72/0436 | 2 |
| H10P72/0414 | 2 |