Spin chuck with concentrated center and radial heating
US-10658204-B2 · May 19, 2020 · US
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Lam Res Ag patents
Lam Res Ag holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Jan 10, 2019 |
| Latest publication | May 19, 2020 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Spin chuck with concentrated center and radial heating
US-2019051541-A1 · Feb 14, 2019 · US
Liquid mixture and method for etching a substrate using the liquid mixture
US-2019010397-A1 · Jan 10, 2019 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Spin chuck with concentrated center and radial heating
US-10658204-B2 · May 19, 2020 · US
Spin chuck with concentrated center and radial heating
US-2019051541-A1 · Feb 14, 2019 · US
Liquid mixture and method for etching a substrate using the liquid mixture
US-2019010397-A1 · Jan 10, 2019 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Chemistry & Metallurgy | 1 |