PECVD films for EUV lithography
US-9618846-B2 · Apr 11, 2017 · US
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Mountsier Thomas patents
Mountsier Thomas is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mountsier Thomas |
| Total patents | 3 |
| First publication | Apr 5, 2016 |
| Latest publication | Apr 11, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Pecvd films for euv lithography
US-2016179005-A1 · Jun 23, 2016 · US
PECVD films for EUV lithography
US-9304396-B2 · Apr 5, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/4088 | 3 |
| H10P76/4085 | 3 |
| H10P14/6336 | 3 |
| H10P76/2043 | 3 |
| H10P76/2041 | 3 |