Microlithographic projection exposure apparatus and measuring device for a projection lens
US-10345710-B2 · Jul 9, 2019 · US
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Mallmann Joerg patents
Mallmann Joerg is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mallmann Joerg |
| Total patents | 4 |
| First publication | May 12, 2016 |
| Latest publication | Jul 9, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
Microlithographic projection exposure apparatus and measuring device for a projection lens
US-2017082930-A1 · Mar 23, 2017 · US
Exposure apparatus and measuring device for a projection lens
US-9436095-B2 · Sep 6, 2016 · US
Microlithographic projection exposure apparatus
US-2016131980-A1 · May 12, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70341 | 4 |
| G03F7/2041 | 4 |
| G03F7/70691 | 3 |
| G03F7/70591 | 3 |
| G03F7/70875 | 3 |