Grouping features of showerheads in substrate processing systems
US-12539569-B2 · Feb 3, 2026 · US
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Madsen Eric patents
Madsen Eric is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Madsen Eric |
| Total patents | 15 |
| First publication | Mar 1, 2018 |
| Latest publication | Feb 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Selected reject band non-radiofrequency-coupling tile and associated methods and systems
US-12526923-B2 · Jan 13, 2026 · US
Shower head
US-D1105018-S · Dec 9, 2025 · US
Reduced diameter carrier ring hardware for substrate processing systems
US-12480210-B2 · Nov 25, 2025 · US
Selected Reject Band Non-Radiofrequency-Coupling Tile and Associated Methods and Systems
US-2023262898-A1 · Aug 17, 2023 · US
Grouping features of showerheads in substrate processing systems
US-2023166371-A1 · Jun 1, 2023 · US
Planar multi-layer radio frequency filters including stacked coils with structural capacitance
US-2023071933-A1 · Mar 9, 2023 · US
Carrier ring to pedestal kinematic mount for substrate processing tools
US-2022415624-A1 · Dec 29, 2022 · US
Substrate supports with integrated rf filters
US-2022415625-A1 · Dec 29, 2022 · US
Reduced diameter carrier ring hardware for substrate processing systems
US-2022235459-A1 · Jul 28, 2022 · US
Recent patents
Latest publications not already listed above.
Rotary friction welded blank for PECVD heated showerhead
US-10941489-B2 · Mar 9, 2021 · US
Chemical vapor deposition shower head for uniform gas distribution
US-2019376184-A1 · Dec 12, 2019 · US
Rotary friction welded blank for pecvd heated showerhead
US-2019211451-A1 · Jul 11, 2019 · US
Rotary friction welded blank for PECVD heated showerhead
US-10266947-B2 · Apr 23, 2019 · US
Rotary friction welded blank for pecvd heated showerhead
US-2018057940-A1 · Mar 1, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 15 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45565 | 9 |
| H01J37/3244 | 9 |
| C23C16/4585 | 7 |
| C23C16/505 | 6 |
| H01J37/32091 | 6 |