Method and device for determining the heating state of an optical element in an optical system
US-12566092-B2 · Mar 3, 2026 · US
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Mack Ruediger patents
Mack Ruediger is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mack Ruediger |
| Total patents | 7 |
| First publication | Jun 11, 2015 |
| Latest publication | Mar 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Optical assembly, method for deforming an optical element, and projection exposure system
US-12360459-B2 · Jul 15, 2025 · US
Method for heating an optical element, and optical system
US-2025123575-A1 · Apr 17, 2025 · US
Optical assembly, method for deforming an optical element, and projection exposure system
US-2023393485-A1 · Dec 7, 2023 · US
Method and device for determining the heating state of an optical element in an optical system
US-2023288260-A1 · Sep 14, 2023 · US
System correction from long timescales
US-9829800-B2 · Nov 28, 2017 · US
System correction from long timescales
US-2015160562-A1 · Jun 11, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70266 | 5 |
| G03F7/70891 | 5 |
| G03F7/705 | 4 |
| G02B27/0068 | 3 |
| G03F7/706 | 3 |