Method for detecting overlay precision and method for compensating overlay deviation
US-11988968-B2 · May 21, 2024 · US
This page is not indexed by search engines while we improve data quality.
Ma Qiliang patents
Ma Qiliang is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ma Qiliang |
| Total patents | 2 |
| First publication | Jul 8, 2021 |
| Latest publication | May 21, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Semiconductor Mfg Int Shanghai Corp | 2 |
| Semiconductor Mfg Int Beijing Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/23 | 2 |
| H10W46/301 | 2 |
| H10P74/203 | 2 |
| H10W46/00 | 2 |
| G06T2207/30148 | 2 |