Tunable ground planes in plasma chambers
US-2016145742-A1 · May 26, 2016 · US
M Saad Hichem is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | M Saad Hichem |
| Total patents | 3 |
| First publication | Mar 24, 2016 |
| Latest publication | May 26, 2016 |
Publications ranked by popularity score, then publication date.
US-2016145742-A1 · May 26, 2016 · US
US-9337072-B2 · May 10, 2016 · US
US-2016084400-A1 · Mar 24, 2016 · US
Latest publications not already listed above.
No data yet.
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 3 |
| Janakiraman Karthik | 2 |
| Juco Eller Y | 2 |
| Sivaramakrishnan Visweswaren | 2 |
| M Saad Hichem | 2 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32165 | 1 |
| C23C16/503 | 1 |
| C23C16/458 | 1 |
| H01J37/32091 | 1 |
| C23C16/45565 | 1 |