Tunable ground planes in plasma chambers
US-2016145742-A1 · May 26, 2016 · US
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Juco Eller Y patents
Juco Eller Y holds 3 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 3 |
| Recent patents | 0 |
| First publication | Mar 1, 2016 |
| Latest publication | May 26, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2016 | 3 |
| Year | Patents |
|---|---|
| 2016 | 3 |
Recent patents
Latest publications where this party is an assignee.
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Tunable ground planes in plasma chambers
US-2016145742-A1 · May 26, 2016 · US
Apparatus and method for substrate clamping in a plasma chamber
US-9337072-B2 · May 10, 2016 · US
Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof
US-9275838-B2 · Mar 1, 2016 · US
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 3 |
| Chemistry & Metallurgy | 2 |