Tunable ground planes in plasma chambers
US-2016145742-A1 · May 26, 2016 · US
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Sivaramakrishnan Visweswaren patents
Sivaramakrishnan Visweswaren holds 2 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 2 |
| Recent patents | 0 |
| First publication | May 10, 2016 |
| Latest publication | May 26, 2016 |
Filing trend
Year-over-year patent counts for this assignee.
Not enough yearly data to assess filing trend yet.
| Year | Patents |
|---|---|
| 2016 | 2 |
| Year | Patents |
|---|---|
| 2016 | 2 |
Recent patents
Latest publications where this party is an assignee.
Apparatus and method for substrate clamping in a plasma chamber
US-9337072-B2 · May 10, 2016 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Tunable ground planes in plasma chambers
US-2016145742-A1 · May 26, 2016 · US
Apparatus and method for substrate clamping in a plasma chamber
US-9337072-B2 · May 10, 2016 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H01J37/32165 | 1 |
| C23C16/503 | 1 |
| C23C16/458 | 1 |
| H01J37/32091 | 1 |
| C23C16/45565 | 1 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Chemistry & Metallurgy | 2 |
| Electricity | 2 |