Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof
US-9298083-B2 · Mar 29, 2016 · US
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Luo Boren patents
Luo Boren is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Luo Boren |
| Total patents | 2 |
| First publication | May 5, 2015 |
| Latest publication | Mar 29, 2016 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of defining an intensity selective exposure photomask
US-9026957-B2 · May 5, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/00 | 1 |
| G06F30/39 | 1 |
| G03F1/68 | 1 |
| G06F17/5068 | 1 |
| G03F1/70 | 1 |