Silicon wafer pre-alignment device and method therefor
US-10276418-B2 · Apr 30, 2019 · US
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Lu Ruzhan patents
Lu Ruzhan is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lu Ruzhan |
| Total patents | 1 |
| First publication | Apr 30, 2019 |
| Latest publication | Apr 30, 2019 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Shanghai Microelectronics Equi | 1 |
| Shanghai Micro Electronics Equipment Group Co Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/232 | 1 |
| H10P74/203 | 1 |
| H10P72/7624 | 1 |
| H10P72/7618 | 1 |
| H10P72/78 | 1 |