Plenum driven hydroxyl combustion oxidation
US-12559841-B2 · Feb 24, 2026 · US
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Lo Hansel patents
Lo Hansel is listed as an inventor on 43 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lo Hansel |
| Total patents | 43 |
| First publication | Jul 18, 2019 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Low-flow radical gas geometrical control through two-dimensional compression between plasma source and chemical reactor
US-2026051460-A1 · Feb 19, 2026 · US
Single-wafer gate oxide module for mobility improvement in sic mosfets
US-2026026080-A1 · Jan 22, 2026 · US
Thin and high-quality oxide layers
US-2025379047-A1 · Dec 11, 2025 · US
Growth of thin oxide layer with silicon nitride and conversion
US-12473644-B2 · Nov 18, 2025 · US
Selective oxidation of a substrate
US-12463030-B2 · Nov 4, 2025 · US
Cyclic growth processes
US-2025266257-A1 · Aug 21, 2025 · US
Growth of thin oxide layer with silicon nitride and conversion
US-2025075321-A1 · Mar 6, 2025 · US
Methods of forming abrupt interfaces between silicon-and-carbon-containing materials and silicon-and-oxygen-containing materials
US-2025037987-A1 · Jan 30, 2025 · US
Processing system and method of delivering a reactant gas
US-12139790-B2 · Nov 12, 2024 · US
Recent patents
Latest publications not already listed above.
Orifice surrounded low pressure hydroxyl combustion
US-2024360996-A1 · Oct 31, 2024 · US
Plenum driven hydroxyl combustion oxidation
US-2024360559-A1 · Oct 31, 2024 · US
Orifice driven hydroxyl combustion oxidation
US-2024350994-A1 · Oct 24, 2024 · US
Indpendent dilution inject for remote plasma oxidation
US-2024297022-A1 · Sep 5, 2024 · US
Bottom thick oxidation growth in high aspect ratio features
US-2024242962-A1 · Jul 18, 2024 · US
Oxidation conformality improvement with in-situ integrated processing
US-2024177990-A1 · May 30, 2024 · US
Chamber inlet
US-D1023987-S · Apr 23, 2024 · US
Asymmetric injection for better wafer uniformity
US-11959169-B2 · Apr 16, 2024 · US
Selective oxidation of a substrate
US-2024112903-A1 · Apr 4, 2024 · US
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
US-2023407471-A1 · Dec 21, 2023 · US
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
US-11732355-B2 · Aug 22, 2023 · US
Asymmetric injection for better wafer uniformity
US-2023028054-A1 · Jan 26, 2023 · US
Processing system and method of delivering a reactant gas
US-2022411927-A1 · Dec 29, 2022 · US
Dogbone inlet cone profile for remote plasma oxidation chamber
US-11501954-B2 · Nov 15, 2022 · US
Side inject designs for improved radical concentrations
US-11501945-B2 · Nov 15, 2022 · US
Asymmetric injection for better wafer uniformity
US-11486038-B2 · Nov 1, 2022 · US
Process system with variable flow valve
US-2022223383-A1 · Jul 14, 2022 · US
Novel and effective homogenize flow mixing design
US-2022165547-A1 · May 26, 2022 · US
Dogbone inlet cone profile for remote plasma oxidation chamber
US-2021272776-A1 · Sep 2, 2021 · US
Argon addition to remote plasma oxidation
US-11081340-B2 · Aug 3, 2021 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 43 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 22 |
| H01J37/32357 | 21 |
| H01J37/3244 | 20 |
| H10P72/0436 | 15 |
| C23C16/45502 | 13 |