Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-2024301584-A1 · Sep 12, 2024 · US
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Lo Chi Wei patents
Lo Chi Wei is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lo Chi Wei |
| Total patents | 8 |
| First publication | Feb 12, 2015 |
| Latest publication | Sep 12, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-2021010160-A1 · Jan 14, 2021 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-10837122-B2 · Nov 17, 2020 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-2019382917-A1 · Dec 19, 2019 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-10428441-B2 · Oct 1, 2019 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-2018016705-A1 · Jan 18, 2018 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-9683308-B2 · Jun 20, 2017 · US
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
US-2015040822-A1 · Feb 12, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 8 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C30B29/08 | 8 |
| C30B29/06 | 8 |
| C30B25/186 | 8 |
| H01J49/105 | 8 |
| H10P72/0408 | 8 |