Extreme ultraviolet lithography device and operating method thereof
US-2026036913-A1 · Feb 5, 2026 · US
Lee Dahae is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lee Dahae |
| Total patents | 5 |
| First publication | Aug 22, 2019 |
| Latest publication | Feb 5, 2026 |
Publications ranked by popularity score, then publication date.
US-2026036913-A1 · Feb 5, 2026 · US
US-2025237963-A1 · Jul 24, 2025 · US
US-2025028257-A1 · Jan 23, 2025 · US
US-10933033-B2 · Mar 2, 2021 · US
US-2019254989-A1 · Aug 22, 2019 · US
Latest publications not already listed above.
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Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 3 |
| Korea Inst Sci & Tech | 2 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70033 | 3 |
| G03F7/702 | 3 |
| G03F7/70233 | 2 |
| G03F7/70525 | 2 |
| G03F7/70091 | 2 |